8 results
Modification of Epitaxial Oxide Films with Ion Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 401 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 309
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- 1995
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Systematics of Silicide Formation by High Dose Miplantation of Transition Metals into Si
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- Journal:
- MRS Online Proceedings Library Archive / Volume 74 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 487
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- 1986
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Formation of Buried Sio2 By High Dose Implantation of Oxygen at Room and Liquid Nitroeen Temperatures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 53 / 1985
- Published online by Cambridge University Press:
- 28 February 2011, 233
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- 1985
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Study of Dose and Dose Rate in the Implantation of Nitrogen Isotopes Into Si(100)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 53 / 1985
- Published online by Cambridge University Press:
- 28 February 2011, 281
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- 1985
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Silicide Formation By High Dose Transition Metal Implants Into Si.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 51 / 1985
- Published online by Cambridge University Press:
- 26 February 2011, 439
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- 1985
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The Influence of Implantation Conditions and Target Orientation in High Dose Implantation of Al+ into Si#
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- Journal:
- MRS Online Proceedings Library Archive / Volume 27 / 1983
- Published online by Cambridge University Press:
- 25 February 2011, 347
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- 1983
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Study† of Near Surface Structure and Composition for High Dose Implantation of Cr+ into Si
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- Journal:
- MRS Online Proceedings Library Archive / Volume 27 / 1983
- Published online by Cambridge University Press:
- 25 February 2011, 341
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- 1983
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